Custom Vacuum Chambers & Precision Manufacturing for Advanced Equipment
Engineering-focused manufacturing of custom vacuum chambers, precision-machined components and vacuum-tight assemblies — from drawing review to inspection and delivery.
Manufacturing Capabilities
Precision CNC Machining
Precision CNC machining for vacuum-grade components.
Vacuum-Tight Welding
Vacuum-tight welding, TIG and automated processes.
Surface Finishing & Cleaning
Surface finishing in a controlled clean welding environment.
Helium Leak Testing & Inspection
Helium leak testing, inspection and assembly support.
At a Glance
Who we are
PANO Vacuum Machinery Technology (Changshu) Co., Ltd. — a dedicated vacuum chamber manufacturer in Changshu, Jiangsu, China.
What we do
Custom vacuum chambers, precision-machined components and vacuum-tight assemblies, from drawing review to inspection and delivery.
Who we serve
Semiconductor equipment, vacuum coating & process tools, and new-energy equipment makers worldwide.
Capability Facts
30 kW
Laser Cutting
30,000 W laser — thick-plate blanking and weld bevel preparation in one pass.
400 t · 6.2 m
Press Brake
400-ton press brake with a 6.2 m bed for large-format forming.
H200
Boring & Milling
Floor-type boring-mill with 4 m-class rotation for flange bore accuracy.
40+
Welding Stations
40+ gas-shielded welding stations in a controlled clean welding environment.
50 t
Overhead Crane
50-ton crane for heavy chamber assembly, lifting and turnover.
≤1×10⁻⁹
He Leak Rate
UL1000-class helium leak testing — every chamber verified before shipment.
FAQ
How large a chamber can you build?
Multi-ton class. Dimensions follow your drawing; a 50-ton crane supports full assembly and turnover, so large chambers ship without sectioning.
What materials do you use?
304L / SUS316L stainless steel as standard. Grades and surface finish follow your drawing and specification.
What is your leak-test capability?
Helium mass-spectrometer leak testing to the 1×10⁻⁹ Pa·m³/s order (UL1000-class), verified per chamber before shipment.
What is your lead time?
Depends on drawing complexity. The quotation includes a milestone schedule that we commit to.
What certifications do you hold?
Certification is in progress (SEMI-related standards and AWS welding systems); audits per customer requirements are welcome — details from sales.
How do I start?
Send your drawing (PDF / DWG / STEP). We perform drawing review, DFM suggestions and quotation; 3D and engineering drawings are welcome.
Is there a minimum order?
Single-piece custom work is accepted — no minimum-order gate, quoted per project.
What warranty do you offer?
Contractual warranty terms apply; every unit ships with its inspection records.
How do overseas customers work with you?
Full English process support — contact [email protected] or +1 307 533 3212; export packing and documentation supported.
What are the payment terms?
Per contract (e.g., 30/70 or agreed LC terms), flexible for industrial customers.
Engineering-Focused from Drawing to Delivery
We review every drawing before fabrication, and document our process across areas such as welding integrity, leak testing and dimensional checks — so your equipment team can rely on what we ship.