Vacuum Chamber Manufacturer

Vacuum Chambers, from Drawing to Delivery

A vacuum chamber manufacturer in Changshu, China. Drawing review, precision machining, welding, helium leak testing and inspection — done in one factory, per drawing, with records on every unit.

48-hour RFQ response · Full English process support · No minimum-order gate

Custom stainless steel vacuum chamber manufactured by PANO
Custom vacuum chambers · Made in Changshu

Factory at a Glance

The equipment behind every quote

30 kW

Laser Cutting

Thick-plate blanking and weld bevels in one pass

400 t· 6.2 m

Press Brake

Large-format forming in a single hit

40+

Welding Stations

TIG and automated, in a controlled clean environment

50 t

Overhead Crane

Heavy chamber assembly and turnover

≤1×10⁻⁹

He Leak Rate

UL1000-class, verified per chamber

Capabilities

Four processes, one factory

Every capability listed here comes from equipment on our shop floor — no rented showrooms.

Precision CNC Machining

ALPHA articulating-arm CMM inspecting a vacuum-grade part

Vacuum-grade parts; key dimensions recorded per part.

Vacuum-Tight Welding

Finished custom vacuum chamber, 304L stainless steel

TIG and automated across 40+ stations in a controlled clean welding environment.

Surface Finishing & Cleaning

Controlled clean environment for surface finishing and inspection

Done in a controlled clean welding environment; inspection records available.

Helium Leak Testing & Assembly

INFICON UL1000-class helium leak tester verifying a chamber

UL1000-class, to the 1×10⁻⁹ Pa·m³/s order, verified per chamber; assembly and turnover supported.

About Us

A real factory, a single shop floor

Controlled clean production environment at the PANO factory
Who we are
PANO Vacuum Machinery Technology (Changshu) Co., Ltd. — a dedicated vacuum chamber manufacturer in Changshu, Jiangsu, China.
What we do
Custom vacuum chambers, precision-machined components and vacuum-tight assemblies — from drawing review to inspection and delivery, under one roof.
Who we serve
Semiconductor equipment, vacuum coating & process tools, and new-energy equipment makers worldwide.
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Quality Control

7 inspection gates before a chamber ships

Drawing review, incoming material, blanking, machining, welding, helium leak testing, final inspection — every chamber passes all 7, with records kept per unit and shipped alongside it.

1Drawing review & DFM2Incoming material3Blanking & bevel4Precision machining5Welding6He leak testing7Final inspection & delivery

Read the full process →

Team & Expertise

In-house, hands-on, per drawing

Process engineers, welders, QC and sales — the people behind each gate, reachable directly.

Process Engineering

Drawing review, DFM, tolerance and leak-path analysis before anything is cut.

CNC & Machining

Vacuum-grade parts on our own floor; key dimensions recorded per part.

Welding

TIG and automated across 40+ stations in a controlled clean welding environment.

QC & Leak Testing

7 inspection gates per chamber, records kept per unit and shipped with it.

Who We Serve

Built for equipment makers

Semiconductor Equipment

Chambers, flanges and precision parts for process tools.

Vacuum Coating & Process Tools

Chamber bodies and components for coating and PVD systems.

New-Energy Equipment

Heavy fabrications for battery and PV process lines.

How to Work With Us

From one drawing to a quoted, inspected delivery

1

Send your drawing

PDF / DWG / STEP — no formal drawing yet? A photo with rough dimensions is enough to start.

2

Review & DFM

Manufacturability, tolerances and leak-path risks agreed before any quote.

3

Quote with schedule

A substantive reply within 48 hours, with a milestone schedule we commit to.

4

Build, test, deliver

7 inspection gates, records per unit, inspection report shipped with the chamber.

Case Examples

What a typical chamber job looks like

Capability examples built from our equipment ledger — what we can make and how it is verified. Named customer case studies follow NDA-permitted disclosure.

Multi-ton 304L chamber

Heavy chamber

Multi-ton 304L chamber

304L stainless, single-piece multi-ton class: 30 kW laser blanking, 400 t / 6.2 m press-brake forming, helium leak test to the 1×10⁻⁹ Pa·m³/s order, assembly and turnover under the 50 t crane; inspection records shipped with the unit.

Vacuum-tight welding, verified per chamber

Welding & leak test

Vacuum-tight welding, verified per chamber

TIG and automated welding across 40+ stations in a controlled clean welding environment, helium leak-tested per unit — not sampled.

See capability examples →

News

Notes from the shop floor

Chamber Material: 304L or SUS316L?

2026-10-27

Chamber Material: 304L or SUS316L?

Short answer: 304L covers most standard chambers; choose 316L when the process involves corrosive atmospheres or the drawing specifies it. Unsure? Put the operating environment in your RFQ and we will advise — not guess.

All articles →

FAQ

Questions equipment teams ask us

How large a chamber can you build?

Multi-ton class. Dimensions follow your drawing; a 50-ton crane supports full assembly and turnover, so large chambers ship without sectioning.

What materials do you use?

304L / SUS316L stainless steel as standard. Grades and surface finish follow your drawing and specification.

What is your leak-test capability?

Helium mass-spectrometer leak testing to the 1×10⁻⁹ Pa·m³/s order (UL1000-class), verified per chamber before shipment.

What is your lead time?

Depends on drawing complexity. The quotation includes a milestone schedule that we commit to.

What certifications do you hold?

Certification is in progress (SEMI-related standards and AWS welding systems); audits per customer requirements are welcome — details from sales.

How do I start?

Send your drawing (PDF / DWG / STEP). We perform drawing review, DFM suggestions and quotation; 3D and engineering drawings are welcome.

Is there a minimum order?

Single-piece custom work is accepted — no minimum-order gate, quoted per project.

What warranty do you offer?

Contractual warranty terms apply; every unit ships with its inspection records.

How do overseas customers work with you?

Full English process support — contact [email protected] or +1 307 533 3212; export packing and documentation supported.

What are the payment terms?

Per contract (e.g., 30/70 or agreed LC terms), flexible for industrial customers.

Send a drawing — get a substantive reply within 48 hours.

English process support end to end. Direct line: +86 130 6372 2038 · [email protected]

Request a QuoteEmail your drawing